NANO-MASTER's PECVD systems are capable of depositing high quality SiO2, Si3N4, CNT, DLC or SiC films. Depending on application, RF showerhead, Hollow Cathode, ICP or Microwave plasma sources can be used. The platen can accomodate...
NANO-MASTER has developed the world's first table top Plasma Assisted Metal Organic Chemical Vapor Deposition (PA-MOCVD) system for GaN, InGaN and AlGaN deposition processes. In this unique system, having a plasma source N2 is use...
NANO-MASTER offers combinatorial evaporation system using substrate masking and computer controlled evaporation rates for individual e-beam evaporators
An affordable ALD equipment that is suitable for R&D and laboratory use to realize the precise step coverage deposition for uniform coating of each atomic layers.
A space saving ALD equipment with substantial functions that is suitable for R&D and laboratory use to realize the precise step coverage deposition for uniform coating of each atomic layers.