UV-LED Mask Aligner UV-KUB3

A NEW APPROACH OF MASK ALIGNMENT

The UV-KUB 3 is a laboratory equipment particularly suited for the production of microfluidic systems, microelectronics and optical ntegrated circuits through photolithography. Its design makes possible the realization of microstructures below 2 µm over the entire 4" work surface with an alignment precision of less than 3 µm.

Boasting the latest advances in UV-LED exposure technology from the UV-KUB 2, the illumination source of the UV-KUB 3 is devoid of undesirable thermal effects and is perfectly monochromatic. The lifetime of the LEDs (> 10000h) which form the UV source makes it a reliable equipment and requires no specific maintenance.

Beyond its size reduced to a minimum, its internal supporting structure dispenses the need for anti-vibration table, combined with low power consumption, the UV-KUB 3 is the ideal tool to control the operating costs.

Fully secure thanks to its dust-proof hood, this equipment is the only solution on the market that democratizes precision photolithography without requiring a cleanroom type environment.

USER-FRIENDLY AND EFFICIENT

With the UV-KUB 3 make precision mask alignments of less than 3 µm in few minutes with the ergonomic control joypad or with the help of the dynamic and intuitive tactile interface.

APPLICATIONS 

- MICROFLUIDIC

- MICROELECTRONICS

- PHOTONICS