UV-LED Exposure-Masking System UV-KUB2

A NEW APPROACH OF MASKING

With the UV-KUB 2 you benefit from the LED technology that generates a cold UV source, therefore eliminating undesirable thermal effects and form a perfectly monochromatic illumination.

By its hermetic configuration, the UV-KUB 2 is an ideal exposure equipment for your laboratory or clean-room. Compact and controlled by touchscreen, the UV-KUB 2 ensures safety through an entirely closed exposure chamber, with both hard or soft contact modes available. The lifetime of the LEDs (>10000h) that form the UV source makes it highly reliable and robust, with no particular maintenance needed.

It is a laboratory equipment especially well suited for the creation of microfluidic systems, integrated optical circuits and surface microstructuration by photolithography.

UNRIVALLED COLLIMATION PERFORMANCE

Kloé company has paid particular attention to the unique and specific optical processing chain based on its broad experience in this field.

The collimated system of the UV LEDs that equips the UV-KUB 2 enables to benefit from an homogeneous exposure better than 5% of variation over the 4 inches working surface.

The angle of divergence of the UV light source is less than 2°. Therefore the achievement of patterns with less than 2µm of resolution and with excellent verticality of edges on thick layers is guaranteed.

APPLICATIONS

- Microfluidic

- Surface Structuration

- Microelectronics

- Photonics