Thin Film Measurement System MProbe40

Our extensive materials library has 500+ materials, with easy import/creation of the new materials and support for a wide range of parametrized materials (from Cauchy to Tauc-Lorentz) is included.

One-click measurement combines data acquisition (reflection or transmittance spectrum) and data analysis. Everybody is a measurement expert with MProbe!

Of course, we have all the sophisticated tools including sensitivity analysis, error-estimator, simulation, filmstack switching, global optimization, layers and materials linking, etc. for complicated applications development

Reflectance and transmittance spectral data can also be used as a raw measurement (for example, as in spectrophotometer) or a for a wide range of other applications.

What’s in the box?

• Main unit: includes spectrometer(s), light source (UV models) , electronics (50W halogen light source is included in microscope illuminator)
• Fiberoptic probe
• Upright inspection microscope with four long WD objectives-95 mm parfocal length (UV and NIR models have three visible and one UVVisNIR achromatic 8x objective)
• TFCompanion -R software Advanced version (USB dongle (license key), Software, user guide and other materials on USB memory stick )
• Calibration sample (Si or Al depending on the model) and black absorber pad
• Test sample- 200nm oxide wafer
• USB cable (connecting main unit to computer)
• Universal power adapter (110V/220V)

In addition, MProbe includes the following Semiconsoft advantages:

• Library with over 500 materials and support for parameterized materials
• 12 months of free software updates and application support
• Hardware upgrade program

Why use MProbe 40

Micro spot: measure with spot size < 4 µm

Flexible: select the best hardware configuration for your application. MProbe model and options. Already have microscope? We can help to integrate…

Affordable: up to 50% savings as compared to other commercial instruments

Precision: unmatched precision <0.01nm or 0.01%

Materials database: extended database (500+ materials) is included

Software: flexible, user friendly and powerful software; integrated control/data acquisition and data analysis; any filmstack: no limits on number of layers, support inhomogeneous and thick incoherent layers, surface roughness, multi-sample analysis, etc.

Technical support: application and technical support

Applications

Patterned wafers, MEMS, other samples that require small measurement spot.

Practically any translucent or low-absorbing film can be measured: SiO2, SiNx, DLC, Photoresist, Polymer, Polyamide, polySi, nanocrystalline Si, aSi, Si, Parylene, industrial coatings.

1nm-1000µm thickness range

Thin-film solar cells: aSi, CIGS, CdT, TCO

Semiconductor and dielectric materials (Photoresist, oxides, nitrides, OLED stack)

Optical coatings (Anti-Reflection, Hard coatings, Filters)

Liquid Crystal displays (Cell Gaps, ITO, Polyamides)

Magnetic media, laser mirrors, thin metal films