Thermal Evaporation Systems NTE-3000

NANO-MASTER’s NTE-3000 is a PC controlled tabletop Thermal Evaporation system with a wide range of applications in organic and metal evaporation. It is a 2kVA system utilizing SCR circuitry for accurate temperature control which is crucial when evaporating organic materials. It is designed with extreme care to achieve clean, uniform, and reproducible processes on a small footprint. It provides low cost, high quality capabilities for demanding applications in R&D and low scale manufacturing.

The NTE-4000 is a stand alone version of the NTE-3000 thermal evaporator system allowing more room for additional options such as various chamber sizes, substrate cleaning and cooling, co-evaporation, and sputtering capabilities.

Features

• 12" Bell Jar / Cylindrical 10" SS / Cubical 14" SS chamber
• Up to 7"x7" plates and 200mm wafers
• Two evaporation sources
• Water cooled feedthrus
• Solid state switching for sequential evaporation
• SCR circuitry for accurate control
• Individual source and substrate shutters
• Cross contamination shields
• Quartz crystal thickness sensor
• Twist lock mechanism for easy substrate holder load/unload
• Substrate rotation
• Closed loop evaporation control
• Fully automated PC based, recipe driven
• LabVIEW user interface
• EMO protection and safety interlocks

Applications

• Metallization in IC interconnects
• Metal contact layer in CIGS Applications
• Organics Field Effect Transistors
• Perovskite solar cells applications
• OLED

Options

• Substrate heating up to 800°C or chilled wafer cooling
• Glancing Angle Deposition (GLAD) with rotation
• Planetary substrate holder
• Additional power module for co-evaporation
• Additional evaporation sources up to six
• RF/DC bias
• Ion source for substrate cleaning
• Magnetron source for sputtering
• MFCs for reactive sputtering/evaporation
• Automatic load/unload
• Various pumping options including cryo pumping stations