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Sputter Coater

SSP1000 Atomic Layer Deposition Equipment

SSP1000 Atomic Layer Deposition Equipment

Affordable desktop type RF sputtering equipment with changeable deposition direction.
Pricing & Availability Download Catalogue Agus
Brand: Agus
Contact Us for better pricing. Warranty Details
  • Film thickness distribution (Ø 100mm): less than ±5%
  • Deposition direction is selectable from 3 choices: UP, SIDE, DOWN
  • RF power supply (with pulse mode)
  • Automated vacuum exhaust system
  • Operation systems by manual
  • Interlock function
  • Both stack arrangement (layered) and parallel arrangement (horizontal) are available
  • Easy setup by users
  • The same cathode as that of the high end model
Specification :
Equipment Dimensions (W x D x H) 608 x 608 x 766 mm
Cathode 1 piece
Uniformity ?±5% (Substrate rotation)
Substrate Heater Not applicable
Combination X
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