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Material Science & Nanotechnology
Spin Coater
Spin Coater POLOS300 Advanced
The POLOS Advanced 300 spin coater is suitable for processing fragments of Ø300mm/12 inch wafers (or Ø360mm substrates), or 8"x8" square substrates.
Brand: SPS
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Warranty Details
- Automatic Chemical Dispense:
- Dispensing fluids through up to 6 spray nozzles
- Each programmable for sequential or parallel dispense
- Clear/Transparant Domed ECTFE Lid with central integrated N2 shower purge
- Available in:
- Seamless Full-Plastic Housing in Natural Polypropylene (NPP)
- Seamless Full-Plastic Housing in High Chemical Resistant PTFE (TFM)
- Table Top spin coater Model: dimensions: 43cm (w) x 65cm (d) x 31cm (h)
- Substrate wafer size: fragments and substrates up to Ø360mm or 8"x8"
- Heavy-Duty Servo-Controlled Motor:
- Assuring repeatable rpm rates
- Rotation Speed Adjustable 1 to 10.000 rpm
- Clockwise and Counterclockwise Rotation
- Puddle function for developer purposes
- Easy, step by step Programming via Gloved-Finger-Friendly, Full-Size Keyboard with LED Backlit Display
- Programmable Digital Process Controller:
- Storage of multiple programs of 99 Step Recipes each, for:
- Speed 1-10.000rpm, Time, Acceleration
- Vacuum On/Off
- Relay Open/Close
- Multi-User Access Levels
- Storage of multiple programs of 99 Step Recipes each, for:
- 2 Programmable ON/OFF Switching Outputs
e.g. for Dispense On/Off, Nitrogen On/Off, etc. - Drain connection
- CE-approved
Specification :
| Available number of programs | Unlimited |
| Steps per program | Unlimited |
| Spin speed | 1 - 12,000 rpm ± 1rpm steps |
| Spin speed accuracy | ± 0.1 rpm |
| Spin rotational direction | Clockwise, Counter clockwise Puddle |
| Max. acceleration | 30,000 rpm/sec |
| Programmable outputs | 3 dry relays, nominal switching capacity 0.5A /125 VAC - 0.3A / 60DC |
| Housing material | Natural Polypropylene (NPP)*** or High Chemical Resistant PTFE (TFM) |
| Process chamber material | Natural Polypropylene (NPP)*** or High Chemical Resistant PTFE (TFM) |
| Interface | Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant |
| External connection | 1 USB Port in the controller |
| Max. substrate diameter | 360mm round or 8? x 8? square |
| Max. process chamber diameter | 402 mm |
| Dimension (desktop version) | 430 (w) x 310 (h) x 650 (d) mm |
| Shipping weight | 32 kgs |
| Shipping dimension | 780 (w) x 620 (h) x 580 (d) mm |
| Voltage | 100 - 120 VAC / 200 - 240 VAC 50/60 Hz (auto select) |
| Power consumption | Max. 1800 W |
| Max. current | 10A / 8A |
| Vacuum | - 80 kPa (-24 inchHg), ? 80 lpm Tube OD Ø8mm |
| Motor purge gas | 20 - 50 kPa, 2-5 l/min, Tube OD Ø 6mm 500lph |
| Drain connection | 1” M-NPT |
