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Material Science & Nanotechnology
Thin Film Measurement
Non-Contact Thin Film Measurement EddyCus TF Lab 2020
Non-contact sheet resistance and layer thickness measurement device for single point measurements
Brand: Suragus
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Warranty Details
The EddyCus TF lab 2020 allows manual single point measurements of conductive thin films and layer thickness measurement of thin metal layers in non-contact mode. The compact bench-top device is ideal for fast and accurate measurements of samples up to 200 x 200 mm² (8 x 8 inches). In addition to the measurement of thin conductive layers also doped wafers and conductive polymers can be analyzed.
Advantages:
- Non-contact real time measurement
- Precise measurement of conductive thin films
- Characterization of hidden and encapsulated conductive layers
- Measurement data saving and export functions
Measurement characteristics:
- Sheet resistance
- Thickness measurement of metal layers
- Single point measurement
- Quality control, input and output control
- Sample sizes: 10 x 10 mm² to 200 x 200 mm² (0.5 x 0.5 inches to 8 x 8 inches)
- Measurement range: 0.001 to 3,000 Ohm/sq
Applications:
- Coated architectural glass, e.g. LowE
- Displays, touch screens and flat panel displays
- OLED and LED applications
- Smart glass
- Graphene layers
- Photovoltaic wafers and cells
- Semiconductor wafers
- Metallization layers and wafer metallization
- De-icing and heating applications
- Battery electrodes
- Conductively coated paper and conductive textiles
Software and device control
- Very user-friendly software
- Intuitive, touch display navigation
- Real-time measurement of sheet resistance and layer thickness
- Software-assisted manual mapping option
- Various data saving and export options
Specification :
| Sheet resistance measurement technology | Non-contact eddy current sensor |
| Substrates | e.g. foil, glass, wafer, etc. |
| Substrate area | 8 inch / 204 x 204 mm (open to three sides) |
| Max. sample thickness/sensor gap(defines distances) | 1 / 2 / 5 / 10 / 25 mm (defined by the thickest sample / application) |
| Sheet resistance range | 0.0001 – 10 Ohm/sq; 2 % accuracy & 1 % repeatability |
| 10 – 100 Ohm/sq; 3 % accuracy& 1.5% repeatability | |
| 100 – 500 Ohm/sq; 4 % accuracy & 2% repeatability | |
| 100 – 1,000 Ohm/sq; 5 % accuracy & 2.5 % repeatability | |
| 1,000 – 3,000 Ohm/sq; 8 % accuracy & 4 % repeatability. | |
| Thickness measurement range of metal films (e.g. Cu, Al) | 2 nm – 2 mm (in accordance with sheet resistance) |
| Device dimension (w/h/d) | 11.4 x 17.5 x 5.5 inch / 290 x 445 x 140 mm |
| Weight | 10 kg |
| Available future | Sheet resistance measurement / metal thickness tester |
