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Material Science & Nanotechnology
Thin Film Measurement
Non-contact Sheet Resistance Mapping EddyCus TF Map 2525
The EddyCus TF map 2525SR automatically measures the sheet resistance of large samples up to 250 x 250 mm² (10 x 10 inches) in non-contact mode
Brand: Suragus
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Warranty Details
Advantages
- Non-contact real time measurement of substrates up to 250 x 250 m² (10 x 10 inches)
- High resolution mapping of conductive thin films
- Characterization even of hidden and encapsulated conductive layers
- Various software-integrated analysis functions (e.g. sheet resistance distribution, line scans, single point analysis)
- Measurement data saving and export functions
Measurement characteristics
- Sheet resistance
- Thin layer uniformity control
- Defect detection and coating analysis
- Measurement and mapping of metal layer thickness
- Quality control, input and output control
- Sample sizes: 50 x 50 mm² to 250 x 250 mm² (2 x 2 inches to 10 x 10 inches)
- Measurement range: 0.001 to 1,000 Ohm/sq
Applications
- Coated architectural glass, e.g. LowE
- Displays, touch screens and flat panel displays
- OLED and LED applications
- Smart glass
- Graphene layers
- Photovoltaic wafers and cells
- Semiconductor wafers
- Metallization layers and wafer metallization
- De-icing and heating applications
- Battery electrodes
- Conductively coated paper and conductive textiles
Software and device control
- Very user-friendly software
- Real-time mapping measurement
- Easy-to-use statistical analysis options
- Various data analysis, data saving and export options
Specification :
| Measurement technology | Non-contact eddy current sensor |
| Substrates | e.g. foil, glass, wafer |
| Max. scanning area | 10 inch / 254 x 254 mm (larger on request) |
| Edge effect correction / exclusion | 2 mm edge exclusion for standard sizes |
| Max. sample thickness/ sensor gap | 2 / 5 / 10 / 25 mm (defined by the thickest sample/ application) |
| Sheet resistance range and accuracy | 0.0001 – 10 Ohm/sq < 2% accuracy |
| 10 – 100 Ohm/sq < 3% accuracy | |
| 100 – 1,000 Ohm/sq < 5% accuracy | |
| Thickness mapping of metal films (e.g. Aluminum, Copper) | 2 nm – 2 mm (in accordance with sheet resistance) |
| Scanning pitch | 1 / 2 / 5 / 10 mm (other on request) |
| Measurement points per time (quadratic shape) | 10.000 measurement points in 5 minutes |
| 1.000.000 measurement points in 30 minutes | |
| Scanning time | 4 inch / 200 x 200 mm in 0.5 to 5 minutes (1 – 10 mm pitch) |
| 8 inch / 200 x 200 mm in 1.5 to 15 minutes (1 – 10 mm pitch) | |
| Device dimension (w/h/d) / Weight | 23.6 x 9.05 x 31.5 inch / 600 x 230 x 800 mm / 27 kg |
| Available features | Metal thickness imaging |
| Anisotropy sheet resistance sensor | |
| Optical transmission sensors at 632 nm wavelength |
