Cathodoluminescence Spectroscopy Rosa 4634

Overview

The Rosa 4634 is a nanometer resolution UV to NIR spectroscopy instrument, based on a disruptive technology called low-temperature quantitative cathodoluminescence, that tightly integrates a scanning electron microscope, a light microscope and a cryogenic stage into one tool. It is specially designed to assists device makers in lowering their production costs, while increasing device reliability.

The Rosa 4634 is a state-of-the-art offline instrument ideal for the photovoltaic and silicon industries. With applications across the PV manufacturing supply chain – from ingots to wafers and cells – the system enables yield efficiency improvements and generates high valuable data for failure analysis and new technology introduction.

In scientific and industrial research, the Rosa 4634‘s ability to clearly map spectroscopic features on nanoscale objects over an extended spectral range opens brand new areas of investigations for researchers, especially on materials such as Silicon, InGaAs or InAlAs.

The light microscope and the objective lens of the scanning electron microscope are carefully intricated so that their focal planes match each other; the light microscope is machined with sub-micrometer precision in order to reach perfect achromatism, high numerical aperture (N.A. 0.71) and constant and superior photon collection efficiency over a field of view of 300 µm, so that quantitative cathodoluminescence benchmarking becomes possible for the first time; the electron microscope also operates at low electron beam energy (3–10 kV) for enhanced cathodoluminescence resolution. Similarly to the Allalin 4027, the Rosa 4634 incorporates a 6-degrees-of-freedom cryogenic stage for arbitrary positioning of the specimen with 1 nm increments and zero drift and vibration at low temperature (10–300 K). Yet, the Rosa 4634 is superior to the Allalin 4027 as it covers an extended spectral range from 180 nm to 1.6 µm, addressing the characterization needs for the NIR emitting materials.

The Rosa 4634 includes a spectrometer, a high speed EMCCD camera for UV-Visible, an InGaAs camera for NIR, a Helium cryostat, a 6-degrees-of-freedom nano positioning stage and additional electronic hardware to run fast hyperspectral acquisitions.

Key Benefits

– Zero alignment: patented achromatic light microscope embedded in the column of a proprietary scanning electron microscope. Operating the Rosa 4634 is intuitive thanks to its context-based user interface and does not require to be an expert

– No compromise: simultaneous generation of a SE image and a CL image with no degradation of the electron probe size

– Blazing fast: generation of hyperspectral maps from UV to NIR in minutes

– Quantitative: the photon collection efficiency is constant over a large field of view of 300 µm with 0% photon loss due to vignetting in polychromatic mode; a mapping of 300 micron is performed without any displacement of the specimen: cathodoluminescence results are reproducible and comparable

– Low temperature stability: acquire an hour-long map at 10 K without observing any drift

– Nanometer positioning system: nanometer scale measurements thanks to the most advanced nano positioning system ever built in an electron microscope

– High light collection efficiency: a numerical aperture of 0,71 (f/0,5) makes low emission cathodoluminescence a reality; indirect band-gap semiconductors such as silicon or diamond can be studied

– Optical hub: for integration of the Attolight CL instrument in a larger spectroscopic system