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Material Science & Nanotechnology
Probe Station
Semi-Automated Probe Station SPS-2600
MicroXact’s semi-automated probe stations, designed to be flexible and easy to use when performing high productivity device characterization, wafer level reliability testing and failure analysis.
Brand: Microxact
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Warranty Details
Features:
- Motorized XY chuck, motorized platen in SPS-2600, motorized Z movement of the chuck in SPS 2800 in standard configuration. Motorized theta is an option.
- Stepper motor-based, no encoders.
- Very cost competitive
- Highly recommended in applications where sub-0°C testing or shielding is desired
- Options available: heated or cooled chucks, zoom scopes or compound microscopes, various shielding, selection of the chucks for DC and RF measurements, and many more
Specification :
| Wafer Size | Up to 100mm standard (up to 125mm as an option) |
| XY Stage | |
| Travel | Up to 125mmx125mm |
| Resolution | Motorized, 1.5µm repeatability |
| Platen | |
| Travel | 12.7 mm or more |
| Adjustment | Dual coarse and fine control, better than 1.5µm repeatability |
| Planarity | <12.7µm across 150 mm |
| Rigidity | <50µm for 4.5 kg |
| Chuck | |
| Vacuum | Multi-zone vacuum |
| Flatness | +/- 13 µm |
| Breakdown Voltage | At least 500 V |
| Isolation | At least 1GigaOhm |
| Adjustment | 360° coarse, +/-6° fine |
| Microscope | High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X |
| System | |
| Terminals | BNC, Triax, Banana plug and other |
| Dimensions | 78cm wide x80cm deep x 58cm high |
| Weight | 85kg to 95kg depending on options selected |
| Facility Requirements | 110VAC, 15A or 220VAC, 10A |
