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Material Science & Nanotechnology
Spin Coater
Spin Coater POLOS200 Advanced
POLOS Advanced 200 are suitable for processing fragments of Ø 200 mm / 8 inch wafers (or Ø 260 mm substrates), or 6"x6" square substrates.
Brand: SPS
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Warranty Details
The POLOS 200 spin coaters can be manual or optional semi-automatic chemical dispense with clear/transparent flat top lid, with center hole. Seamless full-plastic housing in Natural Polypropylene. For fragments and substrates up to Ø200 (or 8”) or 6" x 6".
Coating, Etching, Cleaning, Drying, Developing
Compatible with advanced option such as:
- backside rinsing
- automatic lid opening
- up to 16 digital I/O and 4 analog I/O
Includes a FREE vacuum chuck
Specification :
| Available number of programs | Unlimited |
| Steps per program | Unlimited |
| Spin speed | 1 - 12,000 rpm** ± 1rpm steps |
| Spin speed accuracy | ± 0.1 rpm |
| Spin rotational direction | Clockwise, Counter clockwise Puddle |
| Max. acceleration | 30,000 rpm/sec |
| Programmable outputs | 3 dry relays, nominal switching capacity 0.5A /125 VAC - 0.3A / 60DC |
| Housing material | Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM) |
| Process chamber material | Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM) |
| Interface | Detachable, full-size touchscreen, glove-friendly,IP52, chemical resistant |
| External connection | 1 USB Port in the controller |
| Max. substrate diameter | 260mm round or 6? x 6? square |
| Max. process chamber diameter | 302 mm |
| Dimension (desktop version) | 380 (w) x 307 (h) x 599 (d) mm |
| Shipping weight | 20 kgs |
| Shipping dimension | 680 x 580 x 480 mm |
| Voltage | 100 - 120 VAC / 200 - 240 VAC 50/60 Hz (auto select) |
| Power consumption | Peak 1800 W |
| Max. current | 10A / 8A |
| Vacuum | - 80 kPa (-24 inchHg), ? 80 lpm Tube OD Ø8mm |
| Motor purge gas | 20 - 50 kPa, 2-5 l/min, Tube OD Ø 6mm |
| Drain connection | 1” M-NPT |
