Thin Film Measurement

Accurion EP4 Imaging Ellipsometer

Accurion EP4 Imaging Ellipsometer

The EP4, our latest generation of imaging ellipsometers, combines ellipsometry and microscopy. This enables the characterization of thickness and refractive index with the sensitivity of ellipsometry on micro-structures as small a...
Accurion i4 Series Active Vibration Isolation System

Accurion i4 Series Active Vibration Isolation System

The i4 is a state-of-the-art active vibration isolation system. It is ideal for isolating high-resolution measurement equipment from building vibrations and other disturbances, while providing active compensation in all six degree...
SK-FTM Compact Thickness Film Monitor

SK-FTM Compact Thickness Film Monitor

Compact film thickness monitor is a small and highly accurate reflective spectroscopic film thickness meter that uses a reflective probe with excellent optical properties. It also can be used as an in-line monitoe during the pro...
SK-FTM-MAP Wafer Mapping Film Thickness

SK-FTM-MAP Wafer Mapping Film Thickness

Automatic mapping film thickness measurement over the entire surface of wafers up to 300 mm.
Non-Contact Thin Film Measurement EddyCus TF Lab 2020

Non-Contact Thin Film Measurement EddyCus TF Lab 2020

Non-contact sheet resistance and layer thickness measurement device for single point measurements
Non-contact Sheet Resistance Mapping EddyCus TF Map 2525

Non-contact Sheet Resistance Mapping EddyCus TF Map 2525

The Eddy­Cus TF map 2525SR auto­mat­ic­ally meas­ures the sheet res­ist­ance of large samples up to 250 x 250 mm² (10 x 10 inches) in non-con­tact mode
Non-contact Sheet Resistance Sensor EddyCus TF Inline

Non-contact Sheet Resistance Sensor EddyCus TF Inline

Non-contact sheet resistance and layer thickness measurement solutions for process control
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